Application prospects of micromachining (3)
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In order to process micropores on hard and brittle materials such as monocrystalline silicon, in addition to the micro-hollow drill bits of 0.9 mm in diameter and D91 μm in diamond particles, the Brauschweig Technical University in Germany has developed the same diameter. The CVD diamond drill has a diamond grain size of 4 μm to 8 μm. Despite the large cutting forces, 55 blind holes were drilled on single crystal silicon with this new type of drill, and all the quality was qualified. This blind hole drill bit can drill a pilot hole in front of a closed cavity of a finger grinding machined part. The electroplated diamond core drill bit is more suitable for processing through holes on the plate. However, in the test, the chipping surface of the hole has a chipping of more than 100 μm along the crystal axis of the silicon, and there is also a hole on the edge of the hole. The chipping of 20 μm to 150 μm is a problem to be further studied.
Conclusion and outlook
Micro-machining is an important extension of the micro-machining process. Although the details of the parts that can be processed by micro-cutting are not as good as those of micro-machining, it can be used on various materials together with laser etching and other techniques. Process any spatial structure.
In addition, it requires less equipment than lithography-based microfabrication and eliminates the need for expensive motherboard manufacturing. In short, the micro-machining of parts has great advantages for economically producing medium-sized micro-components.